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DLC-coated Lapping Carrier
High Performance DLC-coated Lapping Carrier
- Lapping carrier is essential for the planarization and polishing of silicon wafers. Our
DLC coating technology provides excellent wear resistance and chemical stability.
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FEATURES
- By applying innovative DLC coating technology, our products deliver superior wear and chemical resistance compared to conventional alternatives, while maintaining exceptional cost competitiveness.
- With a highly reproducible one-stop process, we manufacture one batch of five lapping carriers as a complete set.
** Product design and manufacturing tailored to each customer’s process requirements.
** Capability to design, build, and supply coating equipment.
OFEATURES
CUSTOMIZED MATERIAL →
CUSTOMIZED MATERIAL
Customized Material
for the best quality
SHAPING
PROCESS →
SHAPING PROCESS
Specialized Engineer
for the processing
recipes
LAPPING →
LAPPING
Dedicated 30B
Lapping Equipment
POLISHING →
POLISHING
Dedicated 32B
Polishing Equipment
DLC COATING →
DLC COATING
Specialized J&L Tech.
DLC coating
INSERT →
INSERT
Optimized Insert
Molding & Routing
Equipment
INSPECTION
INSPECTION
J&L Tech made
inspection device
SPECIFICATIONS FOR 28B AND 30B
** Customizable specifications upon request.
| 28, 30B Lapping Carrier | Wafer Size | 300mm (12”) |
| Diameter | ø724mm ~ ø749mm | |
| Number of Wafer Holes | 3ea | |
| Thickness | 777㎛ ± 1.0㎛(Standard) | |
| Inspection Criteria | Peeling, Scratch not allowed | |
| Body | Material | Stainless Steel 420 J2 (+DLC Coating) |
| Hardness | Hv 560 ± 10 | |
| Outer diameter | 724m ± 0/-0.3mm(one side) | |
| Insert | Material | PVDF (Black) |
| DLC Coating | Thickness | 2.5 ± 1.0㎛ (one side) |
| Diameter | 705mm ± 1mm | |
| Hardness | 20.0 Gpa (Nano Identation) = Hv 1,960 | |
| Adhesion Force | 25 N (Scratch Tester, Based on SKD11) |
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