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CARBOZEN™-LAB
Multi Coater capable of testing various plasma coatings at a reasonable price
The CARBOZEN™-LAB series is a compact coating system optimized for laboratory and prototype production.
At a reasonable price, we provide customized equipment to enable various vacuum
deposition tests such as DLC, metal coating, and decorative color coating.
METALLION™ is a coating system that uses arc discharge to evaporate the metal target
of the cathode and deposit it on the surface.
Various metal coatings such as TiN, TiCN, TiAlN, and CrN are available depending on the target used.
All specifications of the system are optimized and provided according to the customer's requirements.
System Specification
| Plasma Source | LIS (Linear Ion Source) UBM Sputter (Unbalanced Magnetron Sputter) Cathodic Arc |
| Chamber Size | Ø500 × H250 mm, Custom-made |
| Cathode size | Ø 300 mm |
| The Initial Vaccum Degree |
Mass flow control system Ar · O2 · N2 · etc |
| Device Operation | Automatic / Semi-automatic |
Main Characteristics
- Various options considering customer budget
- Provides an optimized solution with accumulated coating mass production technology
- Easy-to-use software that allows detailed design and modification of the coating process
CARBOZEN™-LAB Options
●=Standard / ●=Option
| Components | Full Option | PECVD | Sputtering | Metal-ARC | Specifications |
| Rotary pump | ● | ● | ● | ● | 4 ~ 60 m3/h |
| Turbo pump | ● | ● | ● | ● | 200 ~ 400 l/s |
| Throttl Valve | ● | ● | Blade type | ||
| Baratron Gauge | ● | ● | 0.1 ~ 1torr | ||
| Pressure Controller | ● | ● | Automatic Control | ||
| Heater | ● | ● | ● | ● | 400 ~ 500 ℃ |
| 1 Fold Turntable | ● | ● | 3 Axis Rotation | ||
| 2 Fold Turntable | ● | ● | ● | ● | 3 Axis Rotation & Revolution |
| Sputter DC Power Supply | ● | ● | 2 KW DC | ||
| Ion Source DC Power Supply | ● | ● | ● | 10 KW DC | |
| Cathodic Arc Power Supply | ● | ● | 5 KW DC | ||
| Bias Power Supply | ● | ● | ● | ● | 5 KW 350khz |
| Cathode Power Supply | ● | ● | AC or RF | ||
| 4 Inch Sputter Source | ● | ● | Unbalanced Magnetron Sputter | ||
| 4 Inch Ion Source | ● | ● | ● | ● | Closed drift Type |
| 3 Inch Cathodic Arc Source | ● | ● | Direct cooling Type |
