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CARBOZEN™-LAB

Multi Coater capable of testing various plasma coatings at a reasonable price

The CARBOZEN™-LAB series is a compact coating system optimized for laboratory and prototype production.
At a reasonable price, we provide customized equipment to enable various vacuum
deposition tests such as DLC, metal coating, and decorative color coating.

The CARBOZEN™-LAB series is a compact coating system optimized for laboratory and prototype production.
At a reasonable price, we provide customized equipment to enable various vacuum
deposition tests such as DLC, metal coating, and decorative color coating.

System Specification
Plasma Source LIS (Linear Ion Source)
UBM Sputter (Unbalanced Magnetron Sputter)
Cathodic Arc
Chamber Size Ø500 × H250 mm, Custom-made
Cathode size Ø 300 mm
The Initial
Vaccum Degree		 Mass flow control system
Ar · O2 · N2 · etc
Device Operation Automatic / Semi-automatic
CARBOZEN-LAB
Main Characteristics
  • Various options considering customer budget
  • Provides an optimized solution with accumulated coating mass production technology
  • Easy-to-use software that allows detailed design and modification of the coating process
CARBOZEN™-LAB Options
●=Standard / ●=Option
Components Full Option PECVD Sputtering Metal-ARC Specifications
Rotary pump ● ● ● ● 4 ~ 60 m3/h
Turbo pump ● ● ● ● 200 ~ 400 l/s
Throttl Valve ● ● Blade type
Baratron Gauge ● ● 0.1 ~ 1torr
Pressure Controller ● ● Automatic Control
Heater ● ● ● ● 400 ~ 500 ℃
1 Fold Turntable ● ● 3 Axis Rotation
2 Fold Turntable ● ● ● ● 3 Axis Rotation & Revolution
Sputter DC Power Supply ● ● 2 KW DC
Ion Source DC Power Supply ● ● ● 10 KW DC
Cathodic Arc Power Supply ● ● 5 KW DC
Bias Power Supply ● ● ● ● 5 KW 350khz
Cathode Power Supply ● ● AC or RF
4 Inch Sputter Source ● ● Unbalanced Magnetron Sputter
4 Inch Ion Source ● ● ● ● Closed drift Type
3 Inch Cathodic Arc Source ● ● Direct cooling Type
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