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Residual Stress Tester

OptiCurveTM α is a laser optics based thin film stress measurement system.
OptiCurveTM α calculates residual stress of the thin film by measuring curvature
of the substrate and thin film composite using Multi-Laser Beam.

OptiCurveTM α is a laser optics based thin film stress measurement system.
OptiCurveTM α calculates residual stress of the thin film by measuring curvature
of the substrate and thin film composite using Multi-Laser Beam.

  • Calculation of thin film residual stress through the curvature of the substrate and thin film composite (Stoney Equation)

  • Accurate and fast curvature measurement using Multi-Laser Beam

  • 3-axis motion control system

  • Data collection and analysis by PC control

  • User-friendly software based on WINDOWS®

  • All-in-one control unit
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Technical Specification
Range of curvature 0.8 m ~ 200 m
Resolution of curvature Up to 2×10-5 m-1 (rms: 2×10-4 m-1)
Measurable substrate material Si Wafer (100)
Sample size 40mm x 4mm
Sample thickness 300μm
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